• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention discloses a temperature sensor (1) having a positive supply terminal (2) and a negative supply terminal (3), with at least two diodes (4-1, 4-3) connected between the positive supply terminal (2) and the negative supply terminal (3) are arranged electrically in the forward direction and in series, with a measuring connection (5), which is arranged between the at least two diodes, with a controllable current source (6), which is coupled to the measuring connection (5) and is formed positive and a negative current to the measuring terminal (5) to create, and with an evaluation device (8) which is formed, a voltage at the measuring terminal (5) for a positive current of the current source (6) and for a negative current of the power source ( 6) and to calculate a temperature based on the detected voltages. Further, the present invention discloses a sensor device and a manufacturing method.
    公开号:CH710368A2
    申请号:CH01179/15
    申请日:2015-08-17
    公开日:2016-05-13
    发明作者:Fix Richard；Von Jutrzenka Trzebiatowski Christoph
    申请人:Bosch Gmbh Robert；
    IPC主号:
    专利说明:

    The present invention relates to a temperature sensor, a sensor device and a manufacturing method for a temperature sensor.
    State of the art
    There are today a variety of microelectromechanical sensors, so-called. MEMS sensors. For example, MEMS sensors can be used to detect accelerations, pressures and the like.
    Pressure sensors are e.g. used in consumer devices, such as cell phones, home appliances, gas monitors or the like.
    In MEMS-based pressure sensors usually a measuring bridge of resistors is applied to a pressure-elastically deformable membrane.
    DE 10 231 727 A1 shows an example of such a pressure sensor.
    The resistance measuring bridge usually consists of four alternately arranged in succession laterally and longitudinally pressure-sensitive piezoresistive elements. A bending of the membrane leads to an opposing change in resistance of adjacent resistors and thus to an altered bridge voltage.
    The resistors of this bridge are usually very sensitive to temperature. A common way to handle temperature fluctuations is to measure the temperature across the resistor bridge itself or a diode. However, only the average temperature of the membrane can be determined. However, a temperature gradient on the membrane is particularly critical since it is no longer possible to distinguish between temperature-induced and pressure-induced resistance changes. Such a temperature gradient is e.g. caused by the operation of adjacent power-intensive components.
    In order to determine a temperature gradient are at least 2 different temperature-sensitive elements, i.d.R. Diodes or resistors, necessary. These require additional installation space and an additional connection pad for each diode, both on the MEMS sensor element and the evaluation circuit.
    Disclosure of the invention
    The present invention discloses a temperature sensor having the features of claim 1, a sensor device having the features of claim 7 and a manufacturing method having the features of claim 9.
    Accordingly, it is provided:
    [0010] A temperature sensor having a positive supply terminal and a negative supply terminal, with at least two diodes electrically connected in the forward direction and in series between the positive supply terminal and the negative supply terminal, with a measuring terminal arranged between the at least two diodes; with a controllable current source, which is coupled to the measuring terminal and is designed to apply a positive and a negative current to the measuring terminal, and with an evaluation device, which is formed, a voltage at the measuring terminal for a positive current of the current source and for a negative To detect current of the power source and to calculate a temperature based on the detected voltages.
    It is also provided:
    A sensor device with at least one temperature-dependent sensor element, which is designed to detect a physical size, and with a temperature sensor according to the invention.
    Finally, it is planned:
    A manufacturing method for producing a temperature sensor according to the invention, comprising providing a positive supply terminal and a negative supply terminal, arranging at least two diodes between the positive supply terminal and the negative supply terminal electrically in the forward direction and in series, arranging a measurement terminal between the at least two diodes, Coupling a controllable current source, which is designed to apply a positive and a negative current to the measuring terminal, to the measuring terminal, and coupling an evaluating device to the measuring terminal, which is designed to supply a voltage to the measuring terminal for a positive current of the current source and for one to detect negative current of the power source and to calculate a temperature based on the detected voltages.
    Advantages of the invention
    The finding underlying the present invention is that the miniaturization in the field of MEMS-based sensors or semiconductor technology proceeds faster than in the construction and connection technology. The space requirement of the connection pads thus increases more and more in relation to the actual MEMS-based sensor elements or semiconductor measuring elements for temperature measurement, so that it is attempted to keep the number of connection pads low.
    The idea underlying the present invention is now to take this knowledge into account and to provide a possibility in which several temperatures can be detected with a single connection pad.
    For this purpose, the present invention provides that in a temperature sensor consists of a plurality of diodes arranged in series electrically. A measuring terminal is arranged in the series circuit of diodes and coupled to a power source.
    The current source generates in each case a positive or a negative current at the measuring terminal and an evaluation device detects the voltage at the measuring terminal at the positive and at the negative current. A positive current means that the current flows into the measuring connection and a negative current means that the current flows out of the measuring connection.
    If the current source outputs a positive current to the measuring terminal, the potential at the measuring terminal is raised. Consequently, there is only no or only a very small current flowing between the positive supply terminal of the series connection of diodes and the measuring terminal.
    On the other hand, if the current source outputs a negative current to the measuring terminal, the potential at the measuring terminal is lowered. Consequently, there is only no or only a very small current flowing between the measuring terminal and the negative supply terminal of the series connection of diodes.
    Thus, in each case a voltage drop across a portion of the diodes of the series circuit can be detected. If the diodes between the measuring connection and the positive supply connection and the diodes between the measuring connection and the negative supply connection are arranged at different locations, consequently two different temperatures can be detected with only one measuring connection.
    The sensor device according to the invention may e.g. be a MEMS-based bridge of a pressure sensor. If the temperature sensor according to the invention is used in such a measuring bridge, different temperatures at different points of the measuring bridge can be detected with only one measuring connection.
    Advantageous embodiments and developments emerge from the subclaims and from the description with reference to the figures.
    In one embodiment, an even number of diodes is provided, which are arranged electrically in series. In particular, the measuring connection can also be arranged in the middle of the series. As a result, a symmetrical structure of the temperature sensor is achieved, which simplifies the evaluation.
    In one embodiment, the number of diodes based on the voltage applied between the positive supply terminal and the negative supply terminal voltage is formed such that the current flowing through the diodes does not exceed a first threshold. The current flowing through the diodes is to be understood as the current flowing through the series connection of the diodes when no current is supplied from the current source at the measuring connection. The first threshold value lies in particular below the usual measuring current, e.g. a measuring bridge on which the temperature sensor is arranged or is negligible compared to the measuring current.
    In one embodiment, the number of diodes between the positive supply terminal and the measuring terminal and the number of diodes between the measuring terminal and the negative supply terminal is formed such that a respective maximum possible voltage drop below that between the positive supply terminal and the negative supply terminal voltage applied. This makes it possible to perform an accurate temperature measurement with the aid of the operating voltage of the temperature sensor.
    In one embodiment, the number of diodes is configured such that the respective maximum possible voltage drop across the diodes between the positive supply terminal and the measuring terminal or diodes between the measuring terminal and the negative supply terminal of the voltage applied between the positive supply terminal and the negative supply terminal Voltage minus a saturation voltage of the evaluation corresponds. This makes it possible to take advantage of a large measuring range.
    In one embodiment, the evaluation device is designed to control the controllable current source such that the value of the voltage at the measuring connection is below the voltage present between the positive supply connection and the negative supply connection minus a saturation voltage of the evaluation device. This makes it possible to control the current flow through the parts of the series connection of the diodes or to adjust the operating point.
    In one embodiment, the temperature-dependent sensor element is designed as a microelectromechanical pressure sensor element and / or a gas sensor. This allows the use of the present invention in different applications.
    The above refinements and developments can, if appropriate, combine with one another as desired. Further possible refinements, developments and implementations of the invention also include combinations of features of the invention which have not been explicitly mentioned above or described below with regard to the exemplary embodiments. In particular, the person skilled in the art will also add individual aspects as improvements or additions to the respective basic form of the present invention.
    Brief description of the drawings
    The present invention will be explained in more detail with reference to the exemplary embodiments indicated in the schematic figures of the drawings. It shows:<Tb> FIG. 1 <SEP> is a block diagram of an embodiment of a temperature sensor according to the invention;<Tb> FIG. 2 <SEP> is a block diagram of an embodiment of a sensor device according to the invention; and<Tb> FIG. 3 is a flow chart of an embodiment of a method according to the invention.
    In all figures, the same or functionally identical elements and devices - unless otherwise indicated - have been provided with the same reference numerals.
    The course of a diode characteristic is usually approached steadily exponential, strictly speaking, there is thus no forward voltage, from which a diode becomes conductive for the first time. In the following, the term is nevertheless used for the voltage which drops when reaching the usual operating point (measuring current) across the diode. Diode currents for voltages above the forward voltage are significantly greater, currents for voltages below the forward voltage significantly smaller than the measuring current.
    Embodiments of the invention
    1 shows a block diagram of an embodiment of a temperature sensor 1 according to the invention.
    The temperature sensor 1 has a positive supply terminal 2 and a negative supply terminal 3, between which two diodes 4-1, 4-3 are arranged in a series circuit. Other diodes 4-1 - 4-4 are indicated by three dots respectively. The three points in FIG. 1 do not constitute an electrical interruption of the series connection. If no further diodes 4-1 - 4-4 are provided, the diode 4-1 is connected directly to the positive supply connection 2 and the diode 4-3 directly to the negative supply connection 3 coupled.
    Between the first diode 4-1 and the second diode 4-2, a measuring terminal 5 is arranged, which is coupled to a controllable current source 6. For the purpose of illustration only, two symbols for current sources 20, 21 are arranged in the current source 6 in FIG. 1, which symbols can be alternately coupled to the measuring terminal 5 via a switch 23. The current source 20 generates a negative current 7-2 and the current source 21 generates a positive current 7-1.
    Also coupled to the measuring terminal 5 is an evaluation device 8, which in each case at a voltage applied to the measuring terminal 5 negative current 7-2 and at a voltage applied to the measuring terminal 5 positive current 7-1, the voltage 9-1, 9-2 detected at the measuring port 5.
    In Fig. 1 it is further shown that the evaluation device 8 has an analog-to-digital converter 15 which detects the voltages 9-1, 9-2 and for each of the detected voltages 9-1, 9-2 a temperature 11-1, 11-2 calculated. The analog-to-digital converter 15 is for this purpose coupled to a reference voltage 25, which is switchably coupled to either the positive supply terminal 2 or the negative supply terminal 3.
    In an embodiment, the reference voltage may be coupled to the positive supply terminal 2 when the current source 6 generates a negative current 7-2. On the other hand, if the current source 6 generates a positive current 7-1, the reference voltage can be coupled to the negative supply terminal 3. But this is not absolutely necessary. As a reference voltage, any other voltage can be used.
    To calculate the temperatures 11-1, 11-2, the analog-to-digital converter 15 can be used e.g. have a logic which maps the respectively measured voltage 9-1, 9-2 to a corresponding temperature. In another embodiment, e.g. Also, a separate logic 16 (see Fig. 2) be provided for this purpose.
    The current source 6 and the evaluation device 8 may be formed in one embodiment as individual elements of the temperature sensor 1. In other embodiments, the current source 6 and the evaluation device 8 may be e.g. be arranged in an ASIC or the like.
    FIG. 2 shows a block diagram of an embodiment of a sensor device 12 according to the invention.
    The sensor device 12 of FIG. 2 has a temperature sensor 1 according to FIG. 1. For the sake of clarity, only the elements of the temperature sensor 1 are shown here. The temperature sensor 1 is not designated separately.
    1 differs from the temperature sensor 1 of FIG. 1 in that in the evaluation device 8 a separate logic 16 is provided, which detects the voltages 9-1 recorded by the analog-to-digital converter 15, 9-2 and calculates the temperatures 11-1, 11-2.
    The sensor device 12 further comprises a sensor element 13, which is arranged on a measuring element 31 together with four diodes 4-1 - 4-2 and arranged between the diodes 4-1 - 4-4 measuring terminal. In doing so, the sensor element 13 provides the logic 16 with a measured value 30 of a physical magnitude, e.g. a pressure or acceleration or the like. The current source 6 and the evaluation device 8 are arranged together in an ASIC 32.
    The sensor element 13 may e.g. a microelectromechanical pressure sensor element 13 and / or a gas sensor 13. Other types of sensors are also possible.
    The detection of the two temperatures 11-1, 11-2 is performed sequentially. The operating voltage, which is applied to the positive supply terminal 2, in this exemplary embodiment is twice the maximum forward voltage of the diodes 4-1 - 4-4 plus a saturation voltage of the evaluation device 8
    First, a negative current 7-2 is generated by the current source 6, which runs from the positive supply terminal 2 via the diodes 4-2, 4-1 and the current source 6 in the negative supply terminal 3. For this purpose, the switch 23 is set such that the current source 20 is coupled to the measuring terminal 5. The diodes 4-1, 4-2 now drop the double forward voltage 9-1. This forward voltage 9-1 is proportional to the temperature of the first diode pair and thus enables the measurement of the first temperature 11-1.
    Above the second pair of diodes, consisting of diodes 4-3, 4-4, only the significantly lower saturation voltage of the evaluation circuit 8 drops. The parasitic current flowing through the saturation voltage through the diodes 4-3, 4-4 is usually smaller by several orders of magnitude than the measuring current and therefore negligible.
    After the measurement of the first temperature 4-1, a positive measuring current 7-1 is generated by the positive supply connection 2 via the current source 6 into the measuring connection 5. For this purpose, the switch 23 is set such that the current source 21 is coupled to the measuring terminal 5.
    The double forward voltage 9-2 now drops over the second pair of diodes, consisting of diodes 4-3, 4-4 and the first pair of diodes, consisting of diodes 4-1, 4-2 is approached to be considered non-conductive. Also, this forward voltage 9-2 is proportional to the temperature of the second diode pair and thus enables the measurement of the second temperature 11-2.
    If the current source 6 generates a positive current 7-1, the reference voltage 25 of the analog-to-digital converter 15 is coupled to the negative supply terminal 3. If the current source 6 generates a negative current 7-2, the reference voltage 25 of the analog-to-digital converter 15 is coupled to the positive supply terminal 2.
    In one embodiment, the logic 16 may be e.g. also correct the measured values 30 based on the detected temperatures 11-1, 11-2 and output a corrected measured value 30
    The number of diodes 4-1 - 4-2 is selected in one embodiment such that the current flowing between the positive supply terminal 2 via the diodes 4-1 - 4-2 in the negative supply terminal 3 negligible compared to the usual measuring current is, which flows through the sensor element 13. The series connection of the diodes 4-1 - 4-2 can thus always be considered in operation as non-conductive.
    In one embodiment, the number of diodes 4-1, 4-2 and 4-3, 4-4 of a sub-branch (eg, half of the total number of diodes 4-1 - 4-2) is chosen such that the maximum possible voltage drop across the respective sub-branch is just below the operating voltage, ie the voltage applied between the positive supply terminal 2 and the negative supply terminal 3 voltage. The fine adjustment of the voltage drop can be done via the operating point and the size of the diodes 4-1 - 4-4. The required distance to the operating voltage is limited by the minimum permitted voltage drop of the evaluation circuit.
    Due to process variation and large temperature ranges, the o.g. Conditions are not always met by sizing and number of diodes alone. Therefore, in one embodiment, the evaluation device 8 may be designed to additionally regulate the operating point always just below the operating voltage minus the saturation voltage of the evaluation device 8.
    3 shows a flow chart of an embodiment of a production method according to the invention for producing a temperature sensor 1 according to the invention. According to the invention, the provision S1 of a positive supply connection 2 and of a negative supply connection 3 is provided. Further, at least two diodes 4-1 - 4-4 are electrically connected between the positive supply terminal 2 and the negative supply terminal 3 in the forward direction and in series, S2. Between the at least two diodes 4-1 - 4-4 a measuring terminal 5 is arranged, S3.
    Finally, a controllable current source 6 and an evaluation device 8 are coupled to the measuring terminal 5, S4 and S5.
    The controllable current source 6 applies a positive and a negative current 7-1, 7-2 alternately to the measuring terminal 5 and the evaluation device 8 is formed, a voltage 9-1, 9-2 at the measuring terminal 5 for a to detect positive current 7-1 of the current source 6 and for a negative current 7-2 of the current source 6 and to calculate a temperature 11-1, 11-2 based on the detected voltages 9-1, 9-2.
    In an embodiment of the method, an even number of diodes 4-1 - 4-4 are arranged between the positive supply terminal 2 and the negative supply terminal 3. Further, the measurement port 5 is placed in the middle of the series. Further, in one embodiment, the number of diodes 4-1-4-4 is selected based on the voltage applied between the positive supply terminal 2 and the negative supply terminal 3 such that the current flowing through the diodes 4-1-4-4 is a first one Threshold does not exceed.
    In an embodiment, the number of diodes 4-1 - 4-2 between the positive supply terminal 2 and the measuring terminal 5 and the number of diodes 4-3 - 4-4 between the measuring terminal 5 and the negative supply terminal 3 may be selected be that a respective maximum possible voltage drop is below the voltage applied between the positive supply terminal 2 and the negative supply terminal 3 voltage.
    In one embodiment, the number of diodes 4-1 - 4-4 is selected such that the respective maximum possible voltage drop across the diodes 4-1 - 4-2 between the positive supply terminal 2 and the measuring terminal 5 or the diodes 4th -3 - 4-4 between the measuring terminal 5 and the negative supply terminal 3 of the voltage applied between the positive supply terminal 2 and the negative supply terminal 3 voltage minus a saturation voltage of the evaluation device 8 corresponds.
    In one embodiment, the controllable current source 6 can be made controllable such that the voltage at the measuring terminal 5 is below the voltage applied between the positive supply terminal 2 and the negative supply terminal 3 minus a saturation voltage of the evaluation device 8.
    Although the present invention has been described above with reference to preferred embodiments, it is not limited thereto, but modifiable in a variety of ways. In particular, the invention can be varied or modified in many ways without deviating from the gist of the invention.
    权利要求:
    Claims (14)
    [1]
    1. temperature sensor (1),with a positive supply terminal (2) and a negative supply terminal (3);at least two diodes (4-1 - 4-4) electrically connected in the forward direction and in series between the positive supply terminal (2) and the negative supply terminal (3);a measuring terminal (5) disposed between the at least two diodes (4-1 - 4-4);a controllable current source (6) coupled to the sense terminal (5) and configured to apply a positive and a negative current (7-1, 7-2) to the sense terminal (5); andwith an evaluation device (8) which is designed to supply a voltage (9-1, 9-2) to the measuring terminal (5) for a positive current (7-1) of the current source (6) and for a negative current (7) 2) of the current source (6) and to calculate a temperature (11-1, 11-2) based on the detected voltages (9-1, 9-2), respectively.
    [2]
    2. Temperature sensor according to claim 1,wherein an even number of diodes (4-1 - 4-4) are provided, which are arranged electrically in series; and orwherein the measuring port (5) is arranged in the middle of the series.
    [3]
    3. Temperature sensor according to one of the preceding claims,wherein the number of diodes (4-1 - 4-4) is formed based on the voltage applied between the positive supply terminal (2) and the negative supply terminal (3) such that the voltage supplied through the diodes (4-1 - 4-4 ) flowing current does not exceed a first threshold.
    [4]
    4. Temperature sensor according to one of the preceding claims,wherein the number of diodes (4-1 - 4-2) between the positive supply terminal (2) and the measuring terminal (5) and the number of diodes (4-3 - 4-4) between the measuring terminal (5) and the negative Supply connection (3) are formed such that, in particular at the operating point, a respective maximum possible voltage drop in each case below the voltage applied between the positive supply terminal (2) and the negative supply terminal (3).
    [5]
    5. Temperature sensor according to one of the preceding claims,wherein the number of diodes (4-1 - 4-4) is designed such that the respective maximum possible voltage drop across the diodes (4-1 - 4-2) between the positive supply connection (2) and the measuring connection (5) or the diodes (4-3 - 4-4) between the measuring terminal (5) and the negative supply terminal (3) corresponds to the voltage applied between the positive supply terminal (2) and the negative supply terminal (3) minus a saturation voltage of the evaluation device (8) ,
    [6]
    6. Temperature sensor according to one of the preceding claims,wherein the evaluation device (8) is designed to control the controllable current source (6) such that the value of the voltage at the measuring terminal (5) is below the voltage between the positive supply terminal (3) and the negative supply terminal (2) minus one Saturation voltage of the evaluation device (8) is located.
    [7]
    7. sensor device (12),with at least one temperature-dependent sensor element (13), which is designed to detect a physical quantity; andwith a temperature sensor (1) according to one of claims 1 to 6.
    [8]
    8. Sensor device according to claim 7,wherein the temperature-dependent sensor element (13) is designed as a microelectromechanical pressure sensor element (13) and / or a gas sensor (13).
    [9]
    9. A manufacturing method of manufacturing a temperature sensor (1) according to any one of claims 1 to 6, comprising:Providing (S1) a positive supply terminal (2) and a negative supply terminal (3);Arranging (S2) electrically at least two diodes (4-1 - 4-4) between the positive supply terminal (2) and the negative supply terminal (3) in the forward direction and in series;Arranging (S3) a measuring terminal (5) between the at least two diodes (4-1 - 4-4);Coupling (S4) a controllable current source (6), which is designed to apply a positive and a negative current (7-1, 7-2) to the measuring terminal (5), to the measuring terminal (5); andCoupling (S5) of an evaluation device (8) to the measuring terminal (5), which is designed to supply a voltage (9-1, 9-2) to the measuring terminal (5) for a positive current (7-1) of the current source (6 ) and for a negative current (7-2) of the current source (6) and to calculate a temperature (11-1, 11-2) based on the detected voltages (9-1, 9-2).
    [10]
    10. Manufacturing method according to claim 9,wherein an even number of diodes (4-1 - 4-4) are arranged between the positive supply terminal (2) and the negative supply terminal (3); andwherein the measuring port (5) is arranged in the middle of the series.
    [11]
    11. Production method according to one of claims 9 and 10,wherein the number of diodes (4-1 - 4-4) is selected based on the voltage applied between the positive supply terminal (2) and the negative supply terminal (3) such that the voltage supplied by the diodes (4-1 - 4-4 ) flowing current does not exceed a first threshold.
    [12]
    12. Production method according to one of claims 9 to 11,wherein the number of diodes (4-1 - 4-2) between the positive supply terminal (2) and the measuring terminal (5) and the number of diodes (4-3 - 4-4) between the measuring terminal (5) and the negative Supply connection (3) is selected such that, in particular at the operating point, a respective maximum possible voltage drop in each case below the voltage applied between the positive supply terminal (2) and the negative supply terminal (3).
    [13]
    13. Production method according to one of claims 9 to 12wherein the number of diodes (4-1 - 4-4) is selected such that the respective maximum possible voltage drop across the diodes (4-1 - 4-2) between the positive supply terminal (2) and the measuring terminal (5) or the diodes (4-3 - 4-4) between the measuring terminal (5) and the negative supply terminal (3) corresponds to the voltage applied between the positive supply terminal (2) and the negative supply terminal (3) minus a saturation voltage of the evaluation device (8) ,
    [14]
    14. A manufacturing method according to any one of claims 9 to 13, comprisingSetting the controllable current source (6) such that the voltage at the measuring terminal (5) is below the voltage applied between the positive supply terminal (2) and the negative supply terminal (3) minus a saturation voltage of the evaluation device (8).
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    引用文献:
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102014222612.0A|DE102014222612A1|2014-11-05|2014-11-05|Temperature sensor, sensor device and manufacturing method|
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